From splewa at leland.stanford.edu Wed Mar 7 09:27:28 2001 From: splewa at leland.stanford.edu (Sandy Plewa) Date: Wed, 7 Mar 2001 09:27:28 -0800 Subject: SNF Advisory Committee Meeting - Friday, March 16, 11-1 Message-ID: The next meeting of the SNF Advisory Committee is scheduled for Friday, March 16 from 11:00 am to 1:00 pm in CISX316. Lunch will be provided. The agenda will be as follows: The goal of this meeting is to briefly review community feedback from the 3/7 open meeting and to specifically identify some equipment items to be removed from the lab. This latter task, clearly ongoing, will be followed by plans to make the items' removal as painless as possible for any remaining users. Please RSVP. Thanks! Sandy Plewa 723-0720 From kenny at cdr.stanford.edu Wed Mar 7 09:52:12 2001 From: kenny at cdr.stanford.edu (Thomas Kenny) Date: Wed, 7 Mar 2001 09:52:12 -0800 Subject: Planning Committee input Message-ID: All - It has been a while since many of you have seen or heard from me. This has not been due to a lack of interest - more, it has been a remarkable series of conflicts that are all very interesting, but not worth wasting your time reading about. I did talk briefly with Greg Kovacs, and wanted to be sure that my thoughts about equipment removals got onto the record. My group has been making heavy use of the Ion Implanter and the epi-silicon growth reactor, as well as the STS etcher, and the wafer bonder. I imagine there has been plenty said about the STS and the bonder, but I wanted to be sure that people knew that the implanter and epi reactor were also under heavy use. The epi system is becoming a focus for a fast-growing series of interactions with Bosch, a new CIS member, and very active participant in the lab. Bosch allowed us to install a proprietary vapor HF etcher at no cost, and has been offering all kinds of other assistance (STS process recipe upgrades,...). My group is developing a wafer-scale encapsulation process for MEMS devices that uses the epi reactor to grow relatively thick films of low-stress poly and crystalline silicon. We've been developing special recipies for this process, and are filing patents. There is also a new $5M DARPA proposal going out next week (to be followed by others) to use this process to develop GHz resonators for Telecom - an area of active CIS interest. Bosch is willing to contribute cash directly to support maintenance and upgrades for this reactor. I think it would be a huge mistake to remove it. The ion implanter has also been getting heavy use from my group in recent years. We've made it a focus of our research for the formation of sensitive piezoresistive cantilevers and force sensors. Piezoresistive sensors have the significant advantage over capacitive sensing techniques that the readout circuitry does not need to be integrated on the sensor in order to operate at high performance. Through this approach, we've been able to develop very high-performance cantilever beam force sensors for many applications in the last 4 years, and there are 20 journal publications, 30 conference publications, 3 Signed PhDs (Ben Chui, Jonah Harley, Alissa Fitzgerald) and 6 more on the way (Aaron Partridge, Eugene Chow, Yiching Liang, Lian Zhang, Michael Bartsch, Beth Pruitt) - all based on this capability. I think all of these names are easily recognizable to the CIS lab staff as frequent users of facilities, and there has been probably much more than 250K in lab fees paid by my group to support their activities. Aaron Partridge and Kurth Reynolds have been the only student authorized users of this system, and we have spent many hours working with CIS staff and service contract technical people to maintain and support this machine. I realize that there are outside services available for this process, but we have taken advantage of the special opportunity related to having it here to do specialty implants - including the implants at oblique angles that Ben Chui has published and patented. My group relies on this capability (PhD theses for Partridge, Liang, and Bartsch will use this). I realize that every piece of equipment will have some loyal and outspoken users and that the process of identifying and eliminating equipment is a difficult one. I just wanted to be sure that the implanter and epi reactor are added to the list of removal items which have at least one loyal and outspoken supporter... I will be at the 3/16 meeting! Tom Kenny From splewa at leland.stanford.edu Mon Mar 12 09:25:51 2001 From: splewa at leland.stanford.edu (Sandy Plewa) Date: Mon, 12 Mar 2001 09:25:51 -0800 Subject: SNF Advisory Committee Meeting - Friday, March 16, 11-1 -RSVP Message-ID: SNF Advisory Committee: I sent out the following message on March 7th but have only heard from 3 people regarding their attendance. Please let me know today if you will be attending so I will have time to order the food. Thanks! Sandy >The next meeting of the SNF Advisory Committee is scheduled for >Friday, March 16 from 11:00 am to 1:00 pm in CISX316. Lunch will be >provided. > >The agenda will be as follows: > >The goal of this meeting is to briefly review community feedback >from the 3/7 open meeting and to specifically identify some >equipment items to be removed from the lab. This latter task, >clearly ongoing, will be followed by plans to make the items' >removal as painless as possible for any remaining users. > >Please RSVP. >Thanks! > >Sandy Plewa >723-0720 From hdai1 at stanford.edu Tue Mar 13 16:18:23 2001 From: hdai1 at stanford.edu (Hongjie Dai) Date: Tue, 13 Mar 2001 16:18:23 -0800 Subject: SNF Advisory Committee Meeting - Friday, March 16, 11-1 -RSVP In-Reply-To: Message-ID: <5.0.2.1.1.20010313161650.00aca6b8@PObox1.stanford.edu> I will make it to the meeting at about 12:30. We have perspective graduate students visiting in the morning. Hongjie At 09:25 AM 3/12/2001 -0800, Sandy Plewa wrote: >SNF Advisory Committee: I sent out the following message on March 7th but >have only heard from 3 people regarding their attendance. Please let me >know today if you will be attending so I will have time to order the food. > >Thanks! > >Sandy > > >>The next meeting of the SNF Advisory Committee is scheduled for Friday, >>March 16 from 11:00 am to 1:00 pm in CISX316. Lunch will be provided. >> >>The agenda will be as follows: >> >>The goal of this meeting is to briefly review community feedback from >>the 3/7 open meeting and to specifically identify some equipment items >>to be removed from the lab. This latter task, clearly ongoing, will be >>followed by plans to make the items' removal as painless as possible for >>any remaining users. >> >>Please RSVP. >>Thanks! >> >>Sandy Plewa >>723-0720 > ================================ Hongjie Dai Department of Chemistry Stanford University Stanford, CA 94305 Tel: 650-723-4518 (office) 650-725-9156 (lab) Fax: 650-725-9793 ================================