MSDS for PiRL III
mtang at snf.stanford.edu
Mon Nov 3 09:57:28 PST 2003
In addition, Eric -- could you list which tools will be used with this
PiRL? And how much you plan to bring in, where it will be stored,
etc.? (As per the questions on
Thanks again --
Mark McMaster wrote:
> I have sent a request to Brewer for the application info. I am
> intending to use it as a release layer for SU-8 which is a capability
> they claim PiRL has.
> The substrate is first coated with PiRL.
> SU-8 is then applied, exposed and developed.
> Depending upon the developer, and additional O2 plasma ash may be
> required to remove the PiRL in the exposed regions.
> The PiRL is ultimately dissolved with TMAH.
> One obvious difference with PiRL vs pure polyimide materials is the
> ability to dissolve it easily. Perhaps there are other polyimides
> with this capability if so, I would be interested in learning more.
> -----Original Message-----
> From: Mary Tang [mailto:mtang at snf.stanford.edu]
> Sent:Thursday, October 30, 20035:30 PM
> To: Mark McMaster; ericp at snf.stanford.edu
> Cc: specmat at snf.stanford.edu
> Subject: Re: MSDS for PiRL III
> Hi Mark --
> Thanks! Would you happen to have (or maybe Eric has) any application
> notes from Brewer? First, there's no mention of polyimide, just that
> it's a "proprietary" polymer. Second, we've got loads of polyimides
> in the lab, so we (SpecMat) like to ask requestors why something that
> is currently approved will not suffice. I realize that PiRL III is
> totally unlike the other polyimides we use, so it would be helpful to
> have some sort of literature that Brewer should be able to provide as
> to the capabilities and uses for this material. Finally (this is
> probably a request for Eric), we'd like to know specific details about
> its use: how much will be brought in, where it will be stored, where
> it will be used (questions all listed at
> Mary X. Tang, Ph.D.
> National Nanofabrication Users' Network
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA 94305
> mtang at stanford.edu
> Mark McMaster wrote:
>> Attached, please find the MSDS for PiRL III from Brewer Science.
>> Mark McMaster
>> Cooligy, Inc.
>> 2370 Charleston Avenue
>> Mountain View, CA94043
>> (650)417-0324 (Office)
>> (650)417-0380 (Fax)
>> mcmaster at cooligy.com]
>> This message is for the designated recipient(s) only. It may
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Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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