MSDS for PiRL III
eap at gloworm.Stanford.EDU
Mon Nov 3 10:10:15 PST 2003
Mark knows more than I do at this point. The only
thing we've discussed so far is the coater (headway).
On Mon, 3 Nov 2003, Mary Tang wrote:
> In addition, Eric -- could you list which tools will be used with this
> PiRL? And how much you plan to bring in, where it will be stored,
> etc.? (As per the questions on
> http://snf.stanford.edu/Materials/NewMatProc.html )
> Thanks again --
> Mark McMaster wrote:
> > Mary
> > I have sent a request to Brewer for the application info. I am
> > intending to use it as a release layer for SU-8 which is a capability
> > they claim PiRL has.
> > The substrate is first coated with PiRL.
> > SU-8 is then applied, exposed and developed.
> > Depending upon the developer, and additional O2 plasma ash may be
> > required to remove the PiRL in the exposed regions.
> > The PiRL is ultimately dissolved with TMAH.
> > One obvious difference with PiRL vs pure polyimide materials is the
> > ability to dissolve it easily. Perhaps there are other polyimides
> > with this capability if so, I would be interested in learning more.
> > Mark
> > -----Original Message-----
> > From: Mary Tang [mailto:mtang at snf.stanford.edu]
> > Sent:Thursday, October 30, 20035:30 PM
> > To: Mark McMaster; ericp at snf.stanford.edu
> > Cc: specmat at snf.stanford.edu
> > Subject: Re: MSDS for PiRL III
> > Hi Mark --
> > Thanks! Would you happen to have (or maybe Eric has) any application
> > notes from Brewer? First, there's no mention of polyimide, just that
> > it's a "proprietary" polymer. Second, we've got loads of polyimides
> > in the lab, so we (SpecMat) like to ask requestors why something that
> > is currently approved will not suffice. I realize that PiRL III is
> > totally unlike the other polyimides we use, so it would be helpful to
> > have some sort of literature that Brewer should be able to provide as
> > to the capabilities and uses for this material. Finally (this is
> > probably a request for Eric), we'd like to know specific details about
> > its use: how much will be brought in, where it will be stored, where
> > it will be used (questions all listed at
> > http://snf.stanford.edu/Materials/NewMatProc.html)
> > Mary
> > --
> > Mary X. Tang, Ph.D.
> > National Nanofabrication Users' Network
> > Stanford Nanofabrication Facility
> > CIS Room 136, Mail Code 4070
> > Stanford, CA 94305
> > (650)723-9980
> > mtang at stanford.edu
> > http://snf.stanford.edu
> > Mark McMaster wrote:
> >> Mary
> >> Attached, please find the MSDS for PiRL III from Brewer Science.
> >> Thanks,
> >> Mark McMaster
> >> Cooligy, Inc.
> >> 2370 Charleston Avenue
> >> Mountain View, CA94043
> >> (650)417-0324 (Office)
> >> (650)417-0380 (Fax)
> >> mcmaster at cooligy.com]
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> Mary X. Tang, Ph.D.
> National Nanofabrication Users' Network
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA 94305
> mtang at stanford.edu
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