FW: Nitride Dep on CVD Diamond

Shabbir A. Bashar, Ph.D. bashar at snf.stanford.edu
Tue Nov 4 12:04:17 PST 2003


Hi Mary,

Thanks for geting back to me.  The diamond is grown on CMOS clean Si
substrates; there are no other films or metals.  We then remove the
substrate here at SNF by wet etch followed by RCA1 and RCA2 cleans.
Following nitride deposition they do not go into any clean or semiclean
tools.

Our AFM and initial tests with silicon nitride on silicon suggest that
nitride deposition in the furnace yields the best results.  I hope this
helps.

Shabbir.

-----Original Message-----
From: Mary Tang [mailto:mtang at snf.stanford.edu]
Sent: Monday, November 03, 2003 4:35 PM
To: Shabbir A. Bashar, Ph.D.; Specmat at snf.stanford.edu
Subject: Re: FW: Nitride Dep on CVD Diamond


Hi Shabbir --

Sorry about the delay in getting back to you.  Just a few questions...
Where
is the diamond being deposited and is it considered CMOS clean?  If so, we'd
like to have some sort of assurance from whereever it is this processing is
being done.  If not, the general rule has been to request a TXRF test on a
sample wafer to confirm the cleanliness of the film.  Have your wafers been
processed elsewhere or with other novel films other than the diamond?
Finally,
where do your wafers go afterwards?  (i.e., would it be possible to use
PECVD
nitride?)

(Fellow SpecMat'ers:  Anything else I missed?)

Thanks,

Mary


"Shabbir A. Bashar, Ph.D." wrote:

> Hi Mary,
>
> Just wondering you guys had a chance to discuss this.
>
> Kind regards,
>
> Shabbir.
>
> -----Original Message-----
> From: Shabbir A. Bashar, Ph.D. [mailto:bashar at snf.stanford.edu]
> Sent: Wednesday, October 29, 2003 1:08 PM
> To: specmat at snf.stanford.edu
> Subject: Nitride Dep on CVD Diamond
>
> Hi everyone,
>
> Per Mary's suggestion I'm sending out this e-mail to SpecMat.  I need to
> deposit a very smooth nitride film on Diamond.  My initial trials with Si
> wafers using the nitride furnace have yielded very encouraging results and
> I'd like to follow this up by depositing nitride on Diamond.  Please let
me
> know your views ... I'd be happy to meet with you all to answer and
> questions and address any issues.
>
> Thanks!
>
> Shabbir

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu





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