[Fwd: FW: Impurity levels in CVD diamond]

Michael Deal mdeal at stanford.edu
Wed Nov 5 17:12:24 PST 2003


But X-ray flourescence can detect a range of metals in one simple survey 
(and contamination analyses are usually done to look at many metals, not 
just a couple that make up the chamber ).   So I think a TXRF analysis from 
evans or somewhere else should be done.    -mike


At 04:40 PM 11/5/2003, Mary Tang wrote:
>I believe it may mean no Mo or Al detected, since these were part of the
>chamber, rather than no other metals at all.  So, would a TXRF analysis from
>Charles Evans be recommended and satisfactory?
>
>Mary
>
>Michael Deal wrote:
>
> > I agree with Jim.  I don't believe "no metal above the detection limit of
> > 1ppm."   Maybe some metals, but not all.      -mike
> >
> > At 03:20 PM 11/5/2003, Jim McVittie wrote:
> > >Mary,
> > >
> > >His impurity analysis seems to be too good if one assumed standard
> > >detectivity levels. In our best Si wafers with our best cleaning
> > >procedures, we always see impurities above the detectivity level.
> > >My conclusion is that is that their measure method was not up industrial
> > >standards and is not meaningful. Holding him to the same standard as we
> > >use for everyobne else, I want to see results from Charles Evans or have
> > >him do his run just before the tube is clean.  What do you say Mike?
> > >
> > >     Jim
> > >
> > >
> > >
> > >Mary Tang wrote:
> > >
> > > > Hello SpecMat'ers --
> > > >
> > > > Shabbir was asking about the status of his SpecMat request to process
> > > > diamond-coated wafers in the nitride tube.  I had a chat with him and
> > > > learned more about what he wants.  He wants a smooth, dense nitride
> > > > film on top of his wafers (so PECVD nitride will not do.)  I asked him
> > > > if he had any information from the vendor about the quality of the CVD
> > > > diamond film, and this is what he has provided.  Is this adequate to
> > > > approve processing of these wafers in tylannitride?
> > > >
> > > > Mary
> > > >
> > > > -------- Original Message --------
> > > > Subject: FW: Impurity levels in CVD diamond
> > >      Date: Wed, 5 Nov 2003 11:58:03 -0800
> > >      From: "Shabbir A. Bashar, Ph.D." <bashar at snf.stanford.edu>
> > >        To: <mtang at snf.stanford.edu>
> > > >
> > > > Hi Mary,Here's the certification for our CVD diamond vendor.  I hope
> > > > this will satisfy your needs.Shabbir.
> > > > -----Original Message-----
> > > > Sent: Wednesday, November 05, 2003 11:56 AM
> > > > To: bashar at snf.stanford.edu
> > > > Subject: Fwd: Impurity levels in P1 CVD diamond
> > > >
> > > > Note: forwarded message attached.
> > > > -----------------------------------------------------------------------
> > > > Do you Yahoo!?
> > > > Protect your identity with Yahoo! Mail AddressGuard
> > > >    ----------------------------------------------------------------
> > > >
> > > > Subject: Impurity levels in P1 CVD diamond
> > > > Date: Tue, 4 Nov 2003 13:06:22 -0800
> > > > From: "Michael Pinneo" <mpinneo at p1diamond.com>
> > > > To: <Shabbir_Bashar at Group4Labs.com>
> > > > CC: "John Herb" <jaherb at p1diamond.com>
> > > >
> > > > To whom it may concern:
> > > >
> > > > These comments concern non-carbon elemental impurity levels in CVD
> > > > diamond materials made using plasma CVD in P1 Diamond deposition
> > > > systems.
> > > >
> > > > The materials exposed to the deposition process are aluminum (chamber
> > > > walls), molybdenum (substrate holder), and fused silica (observation
> > > > windows).
> > > >
> > > > X-ray fluorescence tests done at FermiLab in 2001 on samples of our CVD
> > > > diamond showed no metal or oxygen impurities above the detection limit
> > > > of one part per million.  Silicon was found in the samples at
> > > > concentrations less than 10ppm.
> > > >
> > > > Based on these results, P1's CVD diamond films meet or exceed
> > > > requirements for designation as CMOS Grade or Electronic Grade
> > > > materials.
> > > >
> > > > Sincerely,
> > > >
> > > >
> > > > Michael Pinneo, Ph.D.
> > > > CTO
> > > >
> > > > P1 Diamond, Inc.
> > > > 3571 Leonard Court
> > > > Santa Clara, CA  95054
> > > >
> > > > 408-567-9684 x103
> > > > 408-567-9685  fax
> > > >
> > > >
>
>--
>Mary X. Tang, Ph.D.
>National Nanofabrication Users' Network
>Stanford Nanofabrication Facility
>CIS Room 136, Mail Code 4070
>Stanford, CA  94305
>(650)723-9980
>mtang at stanford.edu
>http://snf.stanford.edu




More information about the specmat mailing list