Polyimide in stsetch

Mary Tang mtang at snf.stanford.edu
Fri Nov 7 10:03:37 PST 2003


Hi SpecMat'ers --

Another request that has not yet been resolved (as far as I know) is
Randy True's request to do polyimide etching in the stsetcher using the
clean recipe.  Jim -- you had some concerns about this -- did they get
addressed?

Thanks,

Mary

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu





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