UV-NIL New Process Request

Jim McVittie mcvittie at snf.stanford.edu
Wed Nov 19 11:15:22 PST 2003


I just wanted to write down what we talked about yesterday. You are
going to get round 4" quartz wafers with a Cr pattern and do etch tests
in the Amat etcher (8100) starting with a the standard NF3 etch process.
I have some notes on the NF3 process, which I can give you, but they are
on Si etch issues where the etch profile is strongly dependent on the rf


Edward Myers wrote:

> New Materials Request Board, GenoRx has committed to a program on the
> evaluation NanoImprint Lithography.  UV-NIL has the potential to be
> very critical to our company and has become a high priority.  It is
> our objective to have an evaluation UV-NIL hard mask fabricated and
> ready for imprinting by SNF's Dec. 19th Holiday shutdown.  This
> compresses a number of development projects, especially in the
> material selection and dry etch area. This request outlines the
> proposed process flow, material choices and tool selection.  The
> target date for design completion and mask availability is Dec. 5th.
> By this time initial studies on the Cr hard mask and quartz etch needs
> to be completed.  Equipment training is on-going with etch development
> samples available by Friday, Nov. 21st. I hope you can provide a quick
> response and guidance as this program rapidly gathers
> momentum. Regards, Ed MyersGenoRx, Inc.3916 Trust WayHayward, CA
> 94545phone: (510) 732-9100 ext. 117email: emyers at genorx.com
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