Cr Etching in Metal Chamber on P5000

Jim McVittie mcvittie at snf.stanford.edu
Wed Nov 26 13:05:30 PST 2003


> Ed,

The guys at AMAT do not see any problems with adding O2 to the Metal etch
chamber on our
P5000. Their only caution was to make sure we season the chamber before
going back to the Al etch processing. For our low use they did not think
that particles from oxidation of the AlCl3 on the chamber walls would be a
problem. I will see about having a jumper and valve added to add O2 to the
metal chamber.

 Jim


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