Shipley 1805 and developer 351

Mary Tang mtang at
Tue Apr 13 07:16:56 PDT 2004

Goodness, I quite agree, having once worked in a lab that used similar
stuff.  Lan, is there a compelling, technical reason why you want 351?
Is S1805 a dyed resist?  Is 351 recommended for S1805?  Have you
considered using S3617, which is our standard dyed resist?


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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