Shipley 1805 and developer 351

Mary Tang mtang at snf.stanford.edu
Tue Apr 13 07:16:56 PDT 2004


Goodness, I quite agree, having once worked in a lab that used similar
stuff.  Lan, is there a compelling, technical reason why you want 351?
Is S1805 a dyed resist?  Is 351 recommended for S1805?  Have you
considered using S3617, which is our standard dyed resist?

Mary



--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu





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