Zn deposition in the Metalica
mtang at snf.stanford.edu
Wed Apr 14 08:06:27 PDT 2004
We've been abiding by your guideline, stated last summer for Innotec, and by
inference, for metalica, that anything with a vapor pressure higher than that
of In would not be allowed in these systems. We have had several requests for
zinc since then, and have deferred people to Berkeley or Ginzton. Including
Rafael and Mike...
Truly, I'm glad they went to you to work this out.... but PLEASE keep us
(SpecMat and Jeannie) informed. It's only courteous, and it helps that our
organization should be presenting a consistent front. Please, Jim, this
happens more often than we'd like (Ge in the 4108, most recently, for example)
and when are not in communication, it makes things difficult for the
maintenance, labmembers, and process folk who are not in the same loop. It
ends up in a lot of misunderstanding and a lot of yelling that does not have
to happen. It seems to me that SpecMat ought to be the forum in which these
things are decided, or at least, the info is disseminated, and from there it
should be each of our responsibilities to inform the correct people. Since
emails to SpecMat are archived, we have a record of what was decided and
when. And it seems that in light of recent events in which the manner in
which we execute on policy was called into question, that we should try to be
more diligent in documenting such decisions.
So, that's my rant. Jim, there is no doubt that you are the expert and final
word on issues of contamination (among many others), but all I ask is that
people involved be informed... Please?
Back to the request: does this mean that Zn may be run by others who abide by
these guidelines? (Providing their own parts and limiting to thin
depositions?) If so, would an OK and training by Jeannie/maintenance (who
would vet the user to be sure the requestor was competent on the system) be
sufficient to allow other users to do this? Or is this a one-time OK? Since
this involves hardware changes, should we also inform Dick/Jim Haydon? (I
admit that I don't know how involved these hardware changes are.)
Jim McVittie wrote:
> Hi Jeanie,
> Sorry, for not bring you on board. I have worked out an arrangement with
> Rafael and Mike on they can run Zn in the Metalica without impacting other
> users. Here is what we agreed to:
> 1. Make their own target clamp for sputter gun.
> 2. Make their own anode for sputter gun.
> 3. Use their own sputter "chimmy".
> 4. Cover bottom of wafer tray with Al foil.
> 5. Cut hole in Al foil and mount samples to the foil above the hole.
> 6. Limit deposition < 500A.
> 7. Only use gun A.
> 8. Replace re-install all the system std part after their run is complete.
> By using this method they should be able to do thin Au-Zn (5 %)
> depositions without leaving any Zn in the system after their runs.
> Thanks, Jim
> On Tue, 13 Apr 2004, Jeannie Perez wrote:
> > Hi Jim,
> > I've not been notified that Zn has been approved by the SpecMat
> > committee to be use in the Metalica or Innotec. Is this a one time deal?
> > Is this an OK for both system? Could you give me some details. melting
> > point below In.
> > --
> > Jeannie Perez
> > Stanford Nanofabrication Facility
> > CIS Room 146, Mail Code 4070
> > Stanford, CA 94305
> > (650) 723-7997
> > jperez at snf.stanford.edu
> Jim McVittie, Ph.D. Senior Research Scientist
> Allen Center for Integrated Systems Electrical Engineering
> Stanford University jmcvittie at stanford.edu
> Rm. 336, 330 Serra Mall Fax: (650) 723-4659
> Stanford, CA 94305-4075 Tel: (650) 725-3640
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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