New Material registering request [MB300]

Jim McVittie mcvittie at snf.stanford.edu
Mon Apr 26 20:36:30 PDT 2004


Hiro,

Drytek1 is a gold contaminated etcher while the P5000 is a clean tool. You either need to switch
your Drytek1 process to a clean etcher or  switch your P5000 to a "dirty" etcher. Please tell me
what you what to do in Drytek1 and in the P5000, so I can advise you on a solution.

    Thanks,   Jim

"Tetsuhiro (Hiro) Hatogai" wrote:

> Special Materials Committee:
>
> Here is the application for new material, MB300.
> Mainly we are going to use these materials in "Drytek1", "P5000" and
> "semhitachi". I attached the scanned MSDS for the material.
>
> Here is the information for the material required by following website.
> http://snf.stanford.edu/Materials/NewMatProc.html
>
> 1.  Requestor name: Tetsuhiro Hatogai
> 2.  Phone number: 650-799-5366
> 3.  Email address: hatogai at stanford.edu
> 4.  Requestors PI: Professor R. Fabian W. Pease
> 5.  Name of new chemical: MB300
> 6.  No other materials
> 7.  Name of vendor: Master Bond Inc.
> 8.  http://www.masterbond.com
> 9. 154 Hobart Street Hackensack, New Jersey 07601
> 10. We would like to find materials that suit well to fabricate small
> structures
> 11. Find other material that is comparable with MB300.
> 12. Drytek1, semhitachi
> 13. 100ml
> 14. Liquid
> 15. No chemical is needed to mix it
> 16. Please see attached
> 17. Will not be used in the clean area
> 18. Storage group identifier = L, Main Hazard Class = 6
> 19. Should be enough room
> 20. It can be disposed as usual trash.
> 21. Process Flow:  Detail is shown in attached file.
>       Spin-coat on a silicon wafer and bond a thin film that has small
> structures on it.
>       (Spincoat will be made using spin coater that our group owns in
> Packard 076)
>
> Sincerely,
> Tetsuhiro Hatogai (Hiro)
>
>   ------------------------------------------------------------------------
>                         Name: MB300 MSDS p2.JPG
>    MB300 MSDS p2.JPG    Type: JPEG Image (image/jpeg)
>                     Encoding: base64
>
>                         Name: MB300 MSDS p1.JPG
>    MB300 MSDS p1.JPG    Type: JPEG Image (image/jpeg)
>                     Encoding: base64
>
>                                  Name: Process flow Al.ppt
>    Process flow Al.ppt           Type: Microsoft PowerPoint Show (application/vnd.ms-powerpoint)
>                              Encoding: base64
>                       Download Status: Not downloaded with message
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