Germanium on RTP

Yu-Lin Chao diplodoc at ee.ucla.edu
Wed Apr 28 12:45:42 PDT 2004


Hi! Dear Help,

I am planning on going to SNF for GeON formation next week, but just heard
that Ge now is prohibited from running in RTP chambers.
However, I need to use RTP for oxidation and nitridation processes, and
they suggest me sending email to this committee.
What's your suugestion then?

Thank you.

Regards,
Yu-Lin Chao



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