Germanium on RTP

Mary Tang mtang at
Wed Apr 28 13:13:23 PDT 2004

Hi Yu-Lin --

Jim McVittie held a meeting with users and staff members yesterday to discuss
this.  I understand that he will be sending out a note soon, detailing the
procedures by which GeON may be safety processed on the RTP.


Yu-Lin Chao wrote:

> Hi! Dear Help,
> I am planning on going to SNF for GeON formation next week, but just heard
> that Ge now is prohibited from running in RTP chambers.
> However, I need to use RTP for oxidation and nitridation processes, and
> they suggest me sending email to this committee.
> What's your suugestion then?
> Thank you.
> Regards,
> Yu-Lin Chao

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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