SiC wafers in tylanpoly?

Nancy Latta latta at
Fri Aug 6 10:00:46 PDT 2004


I have a request from the MEMS Exchange to deposit poly onto Si and SiC 
wafers.  I don't think that we have done this before.  So, can SiC 
(virgin) wafers go into wbdiff and tylanpoly?

Thank you,


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