SiC wafers in tylanpoly?

Jim McVittie mcvittie at
Fri Aug 6 11:48:10 PDT 2004


Are these new wafers, which have not seen any other processing? If they
are, they most likely are ok. I would probably have them use the Silicide
bench just in case there is a problem.

Nancy Latta wrote:

> Folks,
> I have a request from the MEMS Exchange to deposit poly onto Si and SiC
> wafers.  I don't think that we have done this before.  So, can SiC
> (virgin) wafers go into wbdiff and tylanpoly?
> Thank you,
> -Nancy
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