SiC wafers in tylanpoly?

Nancy Latta latta at snf.stanford.edu
Fri Aug 6 12:00:15 PDT 2004


Hi Jim,

They are described as virgin.  One point, we generally do not allow 
wafers cleaned at wbsilicide into tylanpoly; EE410 excepted.

Sound ok, all?

-Nancy

Jim McVittie wrote:

>Nancy,
>
>Are these new wafers, which have not seen any other processing? If they
>are, they most likely are ok. I would probably have them use the Silicide
>bench just in case there is a problem.
>    Jim
>
>Nancy Latta wrote:
>
>  
>
>>Folks,
>>
>>I have a request from the MEMS Exchange to deposit poly onto Si and SiC
>>wafers.  I don't think that we have done this before.  So, can SiC
>>(virgin) wafers go into wbdiff and tylanpoly?
>>
>>Thank you,
>>
>>-Nancy
>>    
>>




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