SiC wafers in tylanpoly?
latta at snf.stanford.edu
Fri Aug 6 12:00:15 PDT 2004
They are described as virgin. One point, we generally do not allow
wafers cleaned at wbsilicide into tylanpoly; EE410 excepted.
Sound ok, all?
Jim McVittie wrote:
>Are these new wafers, which have not seen any other processing? If they
>are, they most likely are ok. I would probably have them use the Silicide
>bench just in case there is a problem.
>Nancy Latta wrote:
>>I have a request from the MEMS Exchange to deposit poly onto Si and SiC
>>wafers. I don't think that we have done this before. So, can SiC
>>(virgin) wafers go into wbdiff and tylanpoly?
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