Annealing Lithium Tantalate at Tylan4

Jim McVittie mcvittie at
Wed Aug 11 08:57:04 PDT 2004


If the users has Si wafers with a lithium tantalate film them, I agree
they would qualify. One other issue is the stability of the film. The
last thing we want is for someone to evaporate a film in the tube. For
films that we are not familar with, we need some info on its stability
in terms of not coming off in the furnace.


Mary Tang wrote:

> Hi Jim --
> Your proposal sounds fine to me.  I think, however, that this request
> is for silicon wafers which just have this unusual film deposited on
> them.  Does this count?
> By the way, we did have two furnaces in the saw room.  One appears to
> have some irreparable damage to the electronics.  The other one's
> elements have been burnt out.  I've been meaning to look into a repair
> kit for the second one (they sell them, I don't know yet exactly
> what's in them or if they make one for the specific model we have.)
> Sigh...  I should get on it!
> Mary
> Jim McVittie wrote:
>> All,
>> I propose restricting Tylan #4 to Si and Quartz wafers. If we do
>> not, we will get everything under the sun. This tube is really
>> intended to support the other processing done in our lab where there
>> is a metal or other stable material on the wafer, which keeps it out
>> of the other Tylan tubes.
>> I thought we had high temperature air furnace in the saw room that
>> could be used for this application.
>>     Jim
>> Lan Zhang wrote:
>> > Hello All, I would like to get approval to anneal lithium tantalate
>> > wafers in air at 620C with Tylan4(gold contaminated).  Please let
>> > me know if that is OK. Thanks,Lan
>> > --------------------------------------------------------------------
>> > Do you Yahoo!?
>> > New and Improved Yahoo! Mail - 100MB free storage!
> --
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at
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