Annealing Lithium Tantalate at Tylan4

Mary Tang mtang at
Wed Aug 11 13:46:57 PDT 2004

Hi Lan --

Do you have more information about your wafers and material?  Are they
silicon-based?  Do you wafers contain any other unusual films?  We'd
like to make sure that any material that goes into tylan4 does not
volatilize or degrade at processing temperature.  Do you have any
information about the behavior of lithium tantalate under these



Lan Zhang wrote:

> Hello All, I would like to get approval to anneal lithium tantalate
> wafers in air at 620C with Tylan4(gold contaminated).  Please let me
> know if that is OK. Thanks,Lan
> -----------------------------------------------------------------------
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Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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