[Fwd: Re: Annealing Lithium Tantalate at Tylan4]

Mary Tang mtang at snf.stanford.edu
Wed Aug 11 14:17:06 PDT 2004


Hi all --

Sorry, I was wrong -- it's not a film on silicon, but crystalline
material.  What do you think?

Mary

-------- Original Message --------
Subject: Re: Annealing Lithium Tantalate at Tylan4
   Date: Wed, 11 Aug 2004 14:11:41 -0700 (PDT)
   From: Lan Zhang <lanzhangus at yahoo.com>
     To: Mary Tang <mtang at snf.stanford.edu>

 Hi Mary, I attached MSDS for lithium tantalate, which is on SNF MSDS
file as well.  The wafer is lithium tantalate (LiTaO3) and no film is on
that.  Lithium Tanalate is very stable upto 1200C or higher.  Let me
know if you have more question. Thanks,Lan

Mary Tang <mtang at snf.stanford.edu> wrote:

     Hi Lan --

     Do you have more information about your wafers and material?
     Are they silicon-based?  Do you wafers contain any other
     unusual films?  We'd like to make sure that any material that
     goes into tylan4 does not volatilize or degrade at processing
     temperature.  Do you have any information about the behavior
     of lithium tantalate under these conditions?

     Thanks,

     Mary

     Lan Zhang wrote:

    >  Hello All, I would like to get approval to anneal lithium
    >  tantalate wafers in air at 620C with Tylan4(gold
    >  contaminated).  Please let me know if that is OK.
    >  Thanks,Lan
    >  -------------------------------------------------------------
    >  Do you Yahoo!?
    >  New and Improved Yahoo! Mail - 100MB free storage!

     --
     Mary X. Tang, Ph.D.
     Stanford Nanofabrication Facility
     CIS Room 136, Mail Code 4070
     Stanford, CA  94305
     (650)723-9980
     mtang at stanford.edu
     http://snf.stanford.edu


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