[Fwd: Re: Annealing Lithium Tantalate at Tylan4]

Jim McVittie mcvittie at snf.stanford.edu
Wed Aug 11 15:27:54 PDT 2004


Mary,

As I said, I am biased toward Si based processing.  How much does Lan
use our Lab?

    Jim

Mary Tang wrote:

> Hi all --
>
> Sorry, I was wrong -- it's not a film on silicon, but crystalline
> material.  What do you think?
>
> Mary
>
> -------- Original Message --------
> Subject: Re: Annealing Lithium Tantalate at Tylan4
     Date: Wed, 11 Aug 2004 14:11:41 -0700 (PDT)
     From: Lan Zhang <lanzhangus at yahoo.com>
       To: Mary Tang <mtang at snf.stanford.edu>
>
>  Hi Mary, I attached MSDS for lithium tantalate, which is on SNF MSDS
> file as well.  The wafer is lithium tantalate (LiTaO3) and no film is
> on that.  Lithium Tanalate is very stable upto 1200C or higher.  Let
> me know if you have more question. Thanks,Lan
>
> Mary Tang <mtang at snf.stanford.edu> wrote:
>
>      Hi Lan --
>
>      Do you have more information about your wafers and
>      material?  Are they silicon-based?  Do you wafers contain
>      any other unusual films?  We'd like to make sure that any
>      material that goes into tylan4 does not volatilize or
>      degrade at processing temperature.  Do you have any
>      information about the behavior of lithium tantalate under
>      these conditions?
>
>      Thanks,
>
>      Mary
>
>      Lan Zhang wrote:
>
>     > Hello All, I would like to get approval to anneal lithium
>     > tantalate wafers in air at 620C with Tylan4(gold
>     > contaminated).  Please let me know if that is OK.
>     > Thanks,Lan
>     > -----------------------------------------------------------
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>      --
>      Mary X. Tang, Ph.D.
>      Stanford Nanofabrication Facility
>      CIS Room 136, Mail Code 4070
>      Stanford, CA  94305
>      (650)723-9980
>      mtang at stanford.edu
>      http://snf.stanford.edu
>
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