[Fwd: Re: Annealing Lithium Tantalate at Tylan4]
mtang at snf.stanford.edu
Wed Aug 11 15:39:53 PDT 2004
A bit (he's from Coherent.) However, I just sent an email asking if he
could use our muffle furnace in the wafersaw room and he said it would
be fine. Now, I need to fix it (I just ordered new elements, which
should hopefully do the trick.) I will email Lan and ask if him to wait
for us to repair the little furnace.
Jim McVittie wrote:
> As I said, I am biased toward Si based processing. How much does Lan
> use our Lab?
> Mary Tang wrote:
>> Hi all --
>> Sorry, I was wrong -- it's not a film on silicon, but crystalline
>> material. What do you think?
>> -------- Original Message --------
>> Subject: Re: Annealing Lithium Tantalate at Tylan4
Date: Wed, 11 Aug 2004 14:11:41 -0700 (PDT)
From: Lan Zhang <lanzhangus at yahoo.com>
To: Mary Tang <mtang at snf.stanford.edu>
>> Hi Mary, I attached MSDS for lithium tantalate, which is on SNF
>> MSDS file as well. The wafer is lithium tantalate (LiTaO3) and no
>> film is on that. Lithium Tanalate is very stable upto 1200C or
>> higher. Let me know if you have more question. Thanks,Lan
>> Mary Tang <mtang at snf.stanford.edu> wrote:
>> Hi Lan --
>> Do you have more information about your wafers and
>> material? Are they silicon-based? Do you wafers contain
>> any other unusual films? We'd like to make sure that any
>> material that goes into tylan4 does not volatilize or
>> degrade at processing temperature. Do you have any
>> information about the behavior of lithium tantalate under
>> these conditions?
>> Lan Zhang wrote:
>> > Hello All, I would like to get approval to anneal lithium
>> > tantalate wafers in air at 620C with Tylan4(gold
>> > contaminated). Please let me know if that is OK.
>> > Thanks,Lan
>> > ----------------------------------------------------------
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>> Mary X. Tang, Ph.D.
>> Stanford Nanofabrication Facility
>> CIS Room 136, Mail Code 4070
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>> mtang at stanford.edu
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Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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