Request for Yttrium use
jimkruger at yahoo.com
Mon Aug 16 11:07:28 PDT 2004
Request for approval of Y (Yttrium) deposition in
Requestor: Jim Kruger (jimkruger at snf.stanford.edu)
e-mail: jimkruger at yahoo.com
Advisor: Cymer (John Viatella)
1985 Las Plumas Avenue
San Jose, CA 95133
(408) 259-7337 Phone
(408) 729-0277 Fax
Vendor e-mail: acialloys.com
This material is a candidate for use in the
Multi-Layer-Mirrors that will be used for EUV
Work at SNF would be limited to sputter deposition in
Metallica, determination of film thickness by Dektak,
Zygo , manual 4-point probe and possibly AFM. Wafers
are to be sawed into coupons for tests outside of SNF.
Since Yttrium (Y) is already in use in SNF ( Innotec),
I dont believe there are any issues. The vapor
pressure of Y is very similar to that of Si. Finely
divided particles of Y are reported as igniting in air
above 400 C, but thin films for Multi-layer-mirrors
are reported as stable.
Material form: Solid
I propose to bring one sputter target (1 dia. x
0.125) into SNF and deposit 10 to 100 nm on 8 or 12
wafers. Beyond film measurements and sawing, only
annealing tests (hot plate or Blue M oven) are
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