What is Semi-Clean

Ed Myers edmyers at stanford.edu
Wed Aug 18 09:59:00 PDT 2004

SpecMat Committee,

We are getting close having a couple of students spearhead the use of the 
SCT sputter.  This is great, since they can take the lead at understanding 
the influence of RF and heat during deposition.  The only conflict I see is 
the materials they want to use is outside of the current definition of 
Semi-Clean metals.

Metals that are currently being requested include: Ni, Mo, Hf and 
reactively sputtered TiN.  These materials and metals such as Co have been 
successfully introduced into high volume semiconductor manufacturing 
facilities.  There is also an increase in the use conductive metal oxides, 
such as Ru and Ir for contacting high dielectric constant materials.

If we allow these materials in a Semi-Clean sputter, we will have opened a 
cascading effect for the balance of the Semi-Clean tool set.  I think we 
should take this opportunity to revisit the what metals should comprise the 
Semi-Clean list.

Ed Myers

>X-Sieve: CMU Sieve 2.2
>Delivered-To: emyers at snf.stanford.edu
>Date: Mon, 16 Aug 2004 08:49:57 -0700 (PDT)
>From: Abhijit Pethe <pethe at stanford.edu>
>To: emyers at snf.stanford.edu
>Subject: Request for training and use on the SCT
>Hi Ed,
>My name is Abhijit and I am working with Prof. Saraswat on the properties
>on the Metal-Germnanium Ohmic Contacts. The cleanliness of the apparatus
>and the substrate is extermely crucial for studying these
>interfaces. We would hence want to use an equipment belonging to the
>semi-clean category as opposed to the gold-contaminated Innotec.
>We plan to study the following metals
>1. Ni
>2. Hf/W (Hf capped with W)
>3. Ti/TiN
>It would be great if you could train me on the system once it is available
>for use. Please let me know if there is any other information I need to

More information about the specmat mailing list