[Fwd: BCB on SOI Rie]
latta at snf.stanford.edu
Tue Dec 7 12:11:34 PST 2004
This fellow is actually here now, but using gold contaminated
equipment. I heard back from the manufacturer's tech people about the
purity of this product. To quote;
Sodium is typically below the 0.5ppm detection limit (spec is less than
1 ppm). Cu can also be a diffusion concern, and the same applies to
that. Gold is not one of the metals we analyze for, so I do not have
data on that metal.
He is etching very small features and I expect that the gold tools may
not be good enough for his project and I expect that he'll be asking for
p5000etch or lampoly soon.
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From: "Anastassios Mavrokefalos" <anastassiosm at mail.utexas.edu>
Subject: BCB on SOI Rie
Date: Tue, 30 Nov 2004 12:45:41 -0600
More information about the specmat