ZnSe Processing

Mary Tang mtang at snf.stanford.edu
Tue Dec 14 09:53:26 PST 2004

Hi Stephan --

Could you please provide more information about your materials and your 
process flow?  Please refer to 
http://snf.stanford.edu/Materials/NewMatProc.html  for the kinds of 
information needed.

We don't have a lot of experience with II/VI compounds, so your input is 
critical.  Just as a guess, I would say that your materials would be 
considered for use only in gold-contaminated equipment -- and with 
further restrictions only to equipment that is compatible with GaAs 
processing (not all gold-contaminated equipment is safe for GaAs.) 

Please include as much information possible about the cleans, etches, 
process equipment (and process conditions, particularly if they involve 
etching or heating.)  If you need help deciding on equipment and process 
flows, please contact any one of the SpecMat team members (John Shott, 
Jim McVittie, Paul Rissman, Ed Myers, Mahnaz Mansourpour, and me.)



Stephan Goetzinger wrote:

> Dear Ladies and Gentlemen,
> I am thinking of fabricating some microcavities out of a 100 nm thick 
> film of ZnSe (a II/VI semiconductor) grown on a GaAs wafer. That film 
> will contain three 5 nm thick ZnCdSe quantum wells. Is there a chance 
> to bring this material into the clean room and process it there?
> Thank you very much,
> Stephan Goetzinger
> PS: If you have further questions don`t hesitate to contact me.
> Stephan Goetzinger
> Edward L. Ginzton Laboratory Box S-79
> Stanford University
> Stanford, CA 94305-4088
> Tel.: ++1-650-723-3929
> Fax.: ++1-650-723-5320
> http://feynman.stanford.edu/

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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