[Fwd: Re: BCB on SOI Rie], pt. 2

Nancy Latta latta at snf.stanford.edu
Wed Dec 15 11:48:52 PST 2004


As I suspected, the fellow asking about using BCB in our etchers is back 
with a request to use cleaner tools.  He was here last week and we did 
some etching using drytek1.  Since his features are very small and since 
the descum he requested did more than just a light descum, he is asking 
to use lampoly.

Last week I forwarded to you the response I received from the 
manufacturer about the purity of the material.


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