[Fwd: Re: BCB on SOI Rie], pt. 2
latta at snf.stanford.edu
Wed Dec 15 11:48:52 PST 2004
As I suspected, the fellow asking about using BCB in our etchers is back
with a request to use cleaner tools. He was here last week and we did
some etching using drytek1. Since his features are very small and since
the descum he requested did more than just a light descum, he is asking
to use lampoly.
Last week I forwarded to you the response I received from the
manufacturer about the purity of the material.
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From: "Anastassios Mavrokefalos" <anastassiosm at mail.utexas.edu>
Subject: Re: BCB on SOI Rie
Date: Tue, 14 Dec 2004 17:32:12 -0600
More information about the specmat