Question about SCT materials policy
mtang at snf.stanford.edu
Thu Dec 16 07:10:55 PST 2004
Wups! You are right. As far as the furnaces themselves are concerned,
there is no difference between Semiclean A and B.
Nancy Latta wrote:
> I have a question about the following new policy regarding SCT materials-
> d. Semiclean B materials (as with semiclean A materials) should use
> the metal-side of tylanfga.
> Is there a non-metal side to the fga tube? I thought all the boats in
> that tube are in the semiclean metal A category. Is this perhaps a
> reference to tylanbpsg where we do have metal and non-metal boats
> within the same tube?
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
More information about the specmat