Zirconia in the STSetcher

Samuel B. Schaevitz SamS at LSInc.biz
Thu Feb 26 09:26:16 PST 2004


Hey All,

I have not heard anything more about this request. What is the status? I 
have wafers that I need to processes.

Thanks,
Sam

At 03:22 PM 2/19/2004, Samuel B. Schaevitz wrote:
>Mary,
>
>I'm not sure that Jim has made a decision, although I hope he has. In the 
>mean time, here are the answers to your questions:
>
>>1.  Is the zirconia exposed to the plasma, or covered with resist?
>I would like approval for exposed YSZ. If I am only able to get approval 
>if it is covered, that is a start.
>
>>2.  Where will the wafers be cleaned?
>Except for the YSZ deposition step, the wafers are only processed at SNF 
>in non-gold-contaminated equipment.
>
>>3.  Will these wafers be processed through any non-gold-contaminated 
>>equipment
>>after this step?
>No, the wafers are not processed in any other non-gold-contaminated 
>equipment after YSZ deposition.
>
>>4.  Will this material be acceptable as a rule or only material from this
>>specific source, for which the RBS test was done?
>We only have a specific source right now. We will be happy to resubmit if 
>we qualify a new source.
>
>>"Samuel B. Schaevitz" wrote:
>>
>> > Hey All,
>> >
>> > As I discussed with Jim, Lilliputian would like to put Yttria-stabilized
>> > Zirconia into the STS etcher. We have experience from an STS at Silicon
>> > Microstructures indicating that no etching of the YSZ occurs.
>> >
>> > In the attached files:
>> > You will see in the RBS and PIXE data that the film consists of Zirconium,
>> > Yttrium, and Hafnium, fully oxidized, sitting on SiO2. Yttria stabilized
>> > Zirconia is widely investigated as a new gate dielectric, and I have
>> > attached one recent article which comments on the excellent thermodynamic
>> > stability with respect to silicon. Hafnia has almost identical chemical
>> > properties to Zirconia, and so is also investigated for gate dielectrics;
>> > attached is a paper which discusses both Zr and Hf.
>> >
>> > Thank you,
>> > Sam
>> >
>> > ------------------------------------------------------
>> > Samuel B. Schaevitz
>> > Lilliputian Systems, Inc.
>> > 46560 Fremont Blvd, Suite 419
>> > Fremont, CA 94538
>> > Cell: 617 543-5875
>> > Office: 510 656-5999
>> > Fax: 510 656-4999
>> >
>> > Corporate Headquarters
>> > 25-K Olympia Ave, Suite 100
>> > Woburn, MA 01801
>> > Tel: 781 935-9777
>> > Fax: 781 935-0666
>> >
>> >   ------------------------------------------------------------------------
>> >                           Name: YSZ_gate.pdf
>> >    YSZ_gate.pdf           Type: Portable Document Format (application/pdf)
>> >                       Encoding: base64
>> >                Download Status: Not downloaded with message
>> >
>> >                             Name: Hf_Zr_gate.pdf
>> >    Hf_Zr_gate.pdf           Type: Portable Document Format 
>> (application/pdf)
>> >                         Encoding: base64
>> >                  Download Status: Not downloaded with message
>> >
>> >                               Name: RBS OSD3-201.doc
>> >    RBS OSD3-201.doc           Type: WINWORD File (application/msword)
>> >                           Encoding: base64
>> >                    Download Status: Not downloaded with message
>>
>>--
>>Mary X. Tang, Ph.D.
>>Stanford Nanofabrication Facility
>>CIS Room 136, Mail Code 4070
>>Stanford, CA  94305
>>(650)723-9980
>>mtang at stanford.edu
>>http://snf.stanford.edu
>
>------------------------------------------------------
>Samuel B. Schaevitz
>Lilliputian Systems, Inc.
>46560 Fremont Blvd, Suite 419
>Fremont, CA 94538
>Cell: 617 543-5875
>Office: 510 656-5999
>Fax: 510 656-4999
>
>Corporate Headquarters
>25-K Olympia Ave, Suite 100
>Woburn, MA 01801
>Tel: 781 935-9777
>Fax: 781 935-0666

------------------------------------------------------
Samuel B. Schaevitz
Lilliputian Systems, Inc.
46560 Fremont Blvd, Suite 419
Fremont, CA 94538
Cell: 617 543-5875
Office: 510 656-5999
Fax: 510 656-4999

Corporate Headquarters
25-K Olympia Ave, Suite 100
Woburn, MA 01801
Tel: 781 935-9777
Fax: 781 935-0666  




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