new target for metallic
gu at monano.com
Thu Feb 26 14:04:49 PST 2004
AlNi and AlFe alloys are NOT ferromagnetic, because the concentration of
Ni and Fe is pretty low, which is around 3% at. There is no problem to
get plasma on by using our targets.
Mary Tang wrote:
> Hi --
> We spoke with Jeannie, Eric Perozziello, and Dick Crane. All are in
> agreement that as long as the target must be non-magnetic. NiCr is not
> magnetic, despite the high Ni content. Pure Ni, however, is magnetic, and
> there have been several attempts to sputter this in metalica without
> success. It's been attributed to the particular type of gun used in
> metalica. Are the AlNi and AlFe alloys you are interested in magnetic at
> these compositions?
> gu wrote:
>>I want to know whether it is possible to use metallic to sputter some
>>alloys such as AlNi (with small percentage of Ni) and AlFe (with small
>>percentage of Fe). I saw a NiCr target for metallic, it means Ni can be
>>used in metallic. I noted that Fe Ni and Co can not be used for metallic
>>due to magnetic shielding, but small percentage of Fe or Ni in the alloy
>> could be OK.
>>Your quick response will be appreciated.
>>Senior Scientist, Ph. D
>>977 Commercial Street
>>Palo Alto, CA 94303
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA 94305
> mtang at stanford.edu
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