new target for metallic
mtang at snf.stanford.edu
Fri Feb 27 11:30:00 PST 2004
Hi Gu --
As per Jim McVittie of the SpecMat committee, your request for these targets in
metalica is approved.
Good luck with your experiments!
> Hi Mary,
> AlNi and AlFe alloys are NOT ferromagnetic, because the concentration of
> Ni and Fe is pretty low, which is around 3% at. There is no problem to
> get plasma on by using our targets.
> Best wishes,
> Gu Gang
> Mary Tang wrote:
> > Hi --
> > We spoke with Jeannie, Eric Perozziello, and Dick Crane. All are in
> > agreement that as long as the target must be non-magnetic. NiCr is not
> > magnetic, despite the high Ni content. Pure Ni, however, is magnetic, and
> > there have been several attempts to sputter this in metalica without
> > success. It's been attributed to the particular type of gun used in
> > metalica. Are the AlNi and AlFe alloys you are interested in magnetic at
> > these compositions?
> > Mary
> > gu wrote:
> >>Hi All,
> >>Good morning!
> >>I want to know whether it is possible to use metallic to sputter some
> >>alloys such as AlNi (with small percentage of Ni) and AlFe (with small
> >>percentage of Fe). I saw a NiCr target for metallic, it means Ni can be
> >>used in metallic. I noted that Fe Ni and Co can not be used for metallic
> >>due to magnetic shielding, but small percentage of Fe or Ni in the alloy
> >> could be OK.
> >>Your quick response will be appreciated.
> >>Best regards,
> >>Gang Gu
> >>Senior Scientist, Ph. D
> >>Molecular Nanosystems
> >>977 Commercial Street
> >>Palo Alto, CA 94303
> >>Tel 650-8462598
> > --
> > Mary X. Tang, Ph.D.
> > Stanford Nanofabrication Facility
> > CIS Room 136, Mail Code 4070
> > Stanford, CA 94305
> > (650)723-9980
> > mtang at stanford.edu
> > http://snf.stanford.edu
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
More information about the specmat