Clean Si fusion Bonding

thaniff at thaniff at
Wed Jan 7 12:41:15 PST 2004

Dear Specmat members,

I would like to do some si fusion bonding in a vacuum ambient.

The general process outline is:

1. Etch Cavity inta a bulk or SOI wafer.
2. Perfom pre bond clean Sulfuric, RCA1, and RCA2.
3. Bond to another  bulk or SOI wafer in a vacuum environment.
4. Thin down (grind and polish) the non-cavity side of the wafer.
5. Pattern and etch (in STS) the non cavity side of the wafer.

I'd like to know what the current options are for this process in the SNF.

Best Regards,


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