STS and gold-containing samples

Patrick Lu patlu at stanford.edu
Thu Jan 22 17:07:01 PST 2004


Hi,
 
I have some chips that have been flip-chip bonded, where the bond junction
is formed by Au-Au contacts. I was wondering if I could use the STS to etch
these samples ( I know the new STS isn't quite up and running yet). The gold
is completely buried by photoresist, and only silicon and SiO2 surfaces will
be exposed. If anyone can advise me on this, that would be great!
 
Thanks,
 
Patrick Lu
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