New materials request
masafumi at stanford.edu
Fri Jan 30 12:08:41 PST 2004
Dear Special Materials Committee,
I'd like to request to use new materials in CIS. Here is information
Requestor name: Masafumi Nakamura
Phone number: 6507259936
email address: masafumi at stanford.edu
Requestor’s PI (Advisor) or Company: Prof. Prinz
The name of the new Chemical (give all names commonly used):
YSZ(Yttrium Stabilized Zirconia) and GDC(Gadolinium Doped Ceria)
If there are secondary new chemicals that must be used with this material, such as a developer for a new resist, list each of them here and supply MSDSs for each of them.
Name of vendor/manufacturer that you are planning to obtain this
material from: Kurt J. Lesker
URL for vendor’s website where info on the proposed chemical can be
Vendor’s address and phone number:
3983 First Street
Livermore, CA 94551
What is your reason for wanting to bring this material into the lab:
I want to process, such as etch, Si wafer or SiN in CIS after deposition
of these materials.
List all the lab equipment and wet benches that you propose to use with this chemical:
Drytek1 and wetbenchgen
Proposed quantity of the chemical that you want to bring into lab (give both raw and mixed quantities):
YSZ: Yttrium 16%, Zirconia 84% - Purity:99.7%
GDC: Gadolinium 20%, Ceria 20% - Purity:99.9%
State the form that the proposed chemical is in: Thin film on Si wafer.
Put together a detailed process flow description on how you proposed to use this
The materials are DC sputtered thin film and oxidized afterward.
I sent MSDS to Jim via fax. If you have any comment on them, Please let
More information about the specmat