Using Polyimide.

Hyeun-su Kim aeonia at stanford.edu
Sun Jul 11 13:21:47 PDT 2004


Hi,

I have a bottle of polyimide (HD chemical, PI-2610). I am thinking about spin coating 
and drytek etching. I have MSDS for this.
Could you tell me what I need to do to bring it into the clean room? 

Thank you.

Hyeun-Su (aeonia)



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