Molybdenum Disilicide in Metallica

jim kruger jimkruger at
Wed Jul 21 16:50:17 PDT 2004

I am requesting approval of deposition of MoSi2 in
Metallica. Other than film thickness, manual 4-pt
probe and annealing (hot plate or Blue M oven), and
wafer saw, no other equipment use is planned.



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