MSDS for AZ 100nXT

artyjamo at artyjamo at
Thu Jul 22 10:13:38 PDT 2004

Hello SpecMat,
     I would like to request approval to use a negative resist made by Clariant (AZ) called AZ 100nXT.   This is a thick coating (42-100um) negative resist that develops in LDD-26W  (TMAH) and cleans up in Acetone/ NMP    i.e.   a thick resist that is easier to strip than SU-8.   I would use this resist on the headway spinner, and expose on the KS MA-6
-Aleta Jamora (ajamo)
artyjamo at
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Rehsfil0_[1].rtf
Type: application/x-rtf
Size: 225701 bytes
Desc: not available
URL: <>

More information about the specmat mailing list