MSDS for AZ 100nXT

artyjamo at comcast.net artyjamo at comcast.net
Thu Jul 22 10:13:38 PDT 2004


Hello SpecMat,
     I would like to request approval to use a negative resist made by Clariant (AZ) called AZ 100nXT.   This is a thick coating (42-100um) negative resist that develops in LDD-26W  (TMAH) and cleans up in Acetone/ NMP    i.e.   a thick resist that is easier to strip than SU-8.   I would use this resist on the headway spinner, and expose on the KS MA-6
Thanks!
-Aleta Jamora (ajamo)
artyjamo at comcast.net
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