PiRL Information

Mahnaz Mansourpour mahnaz at snf.stanford.edu
Mon Jun 21 16:03:54 PDT 2004


I will be interested to see how this chemical performs.

mahnaz

Mary Tang wrote:

> Hi everyone --
>
> Brewer Scientific has visited a couple of times to discuss this (and other)
> polymers.  I understand that several labmembers have expressed interest in this
> product.  (James -- I take it that you are submitting this on behalf of the
> interested labmembers who will be doing the actual characterization work.)
>
> This is, I believe, a variation of polyimide.  If use is restricted to manual
> coaters and dry etching tools, then I think it's OK to use.  Are there any
> objections?
>
> Mary
>
> James Conway wrote:
>
> > Greetings SpecMat and Mahnaz:
> >
> > Attached is the MSDS for PiRL by brewer scientific.
> >
> >    This is a proprietary polymer for release layer under photoresist.  I
> > would like obtain a 250 ml sample of this material to evaluate if we can
> > use this as a release layer under SU-8 resist -- so we can get the SU-8
> > off after RIE etching. Might also be useful for lift-off structures.
> >
> > Please approve limited quantities for evaluation use only under my control.
> >
> > Thank you,
> >
> > James Conway
> > jwc
> >
> > ++++++++++++++++++++++++++++++++++++++++++++
> > Hi James,
> >
> > Thanks for the call back.  I have attached some overview information on
> > PiRL, processing information for PiRL, and the MSDS.
> >
> > We would be able to send a 250 ml sample.  As you mentioned, we would
> > appreciate feedback, pictures, etc.  Also, we ask customers to cover the
> > shipping cost.  So if you could please send me your shipping information.
> >
> > You mentioned that you would be starting the work this summer.  If so, when
> > would you need the sample?
> >
> > Regards,
> > Shane
> >
> >   ------------------------------------------------------------------------
> >                                 Name: sm_pirl_pres_a.pdf
> >    sm_pirl_pres_a.pdf           Type: Portable Document Format (application/pdf)
> >                             Encoding: base64
> >                      Download Status: Not downloaded with message
> >
> >                            Name: PiRL_msds.pdf
> >    PiRL_msds.pdf           Type: Portable Document Format (application/pdf)
> >                        Encoding: base64
> >                 Download Status: Not downloaded with message
> >
> >                               Name: sm_pirl_data.pdf
> >    sm_pirl_data.pdf           Type: Portable Document Format (application/pdf)
> >                           Encoding: base64
> >                    Download Status: Not downloaded with message
>
> --
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at stanford.edu
> http://snf.stanford.edu




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