Application to use SU-8

[Umberto Ulmanella]

To whom it may concern,

I am contemplating the possibility of using SU-8 photoresist from 
Microchem corp. (http://www.microchem.com) in my process. The goal is to 
obtain tall structures, in the order of 100um or more, in particular 
reservoir and channels, with minimum feature size 10um. Currently the 
design has not been finalized, so the choice between the different 
families of product is still open, with the SU8-50 to 100 and SU8-2035 to 
2100 the most likely. I would appreciate any feedback on the choice of a 
particular type, especially for what concerns the difference between the 
traditional SU8 and the newer SU8-2000 types.
Please find attached the necessary documentation as per the SNF procedures 
listed in your website. Any suggestions regarding changes to equipment 
and/or procedures are welcome.

Regards,

Umberto Ulmanella




-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20040629/44515e07/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: MSDS SU-8 Developer.pdf
Type: application/octet-stream
Size: 384600 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20040629/44515e07/attachment.obj>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: MSDS SU-8 PR.pdf
Type: application/octet-stream
Size: 41631 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20040629/44515e07/attachment-0001.obj>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: MSDS SU-8 Stripper.pdf
Type: application/octet-stream
Size: 37970 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20040629/44515e07/attachment-0002.obj>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: SU-8 application.doc
Type: application/octet-stream
Size: 34304 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20040629/44515e07/attachment-0003.obj>