Chemical Request

Claudia Richter crlgr at
Mon Mar 1 16:41:14 PST 2004

Specmat Committee:

I've spoken to Mahnaz regarding the use of silicone rubbers (PDMS, and OE4100) in the photolithography area. We plan to spin-coat these silicones on 4 inch silicon wafers and plan to do this using the Headway manual coater and curing using the hotplates. I believe Dien (coral: adnguyen) has submitted the information for the OE4100 elastomer, but we would like to add a solvent to dilute the elastomer to get thinner coats. We plan on diluting the elastomer with a solvent recommended by the manufacturer called mesitylene (1,3,5-trimethylbenzene). Attached is the MSDS sheet for this chemical.

We plan on bringing in the OE4100 and mesitylene mixture in a vial to the Headway to spin-coat wafers and cure it in the photolithography room. The amount of mesitylene in elastomer shall be about 10% by weight. 

If there is any further information needed to complete this request or concerns please contact me at crichter at or Dien at adnguyen at

Best regards,


Claudia Richter
Senior Staff Engineer
Los Gatos Research Inc.
67 E. Evelyn Ave. Ste.3
Mountain View, CA. 94040
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