stabilized Zirconia SpecMar request, follow-up

Jeremy Cheng acopland at stanford.edu
Tue Mar 23 12:00:58 PST 2004


Hello,

	I'm following up on this SpecMat request, submitted 2 weeks ago.
Is there any update on the status or any further information needed?

Thanks!
Jeremy Cheng

acopland at snf.stanford.edu


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Date: Mon, 08 Mar 2004 11:08:09 -0800
From: Jeremy Cheng <acopland at stanford.edu>
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CC: acopland at stanford.edu
Subject: stabilized Zirconia SpecMat request
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I would like to submit this request for the processing of single crystal
stabilized zirconia.  Zirconia is an inert, stable, oxide ceramic and a
common microfab compatible high-K dielectric material:

1. Name: Jeremy Cheng
2. Phone: x5-9936
3. e-mail: acopland at stanford.edu
4. PI: Prof. Fritz Prinz, ME
5. Materials: Yttria-stabilized Zirconia (a.k.a. YSZ, stabilized
zirconia, cubic zirconia)
6. Secondary Materials: none
7. Vendor/ manufacturer: MTI crystal (www.mticrystal.com)
8. http://mticrystal.com/datasheet/YSZ.doc
9. Vendor address:
    2700 Rydin Road, Unit D
    Richmond, CA 94804
    (510)525-3070

10.11.
   I'd like to study ion damage in these substrates in the ion
implanter.  YSZ exhibits unusually high radiation stability.  If the
implants are successful, we'd like to alternate depositing this material
from our on-campus sputtering machine with implanting the the snf
implanter.

12. lab equipment: Varian 350-D, wbgeneral
13. quantity: up to about 5 single crystal substrates at a time
14. solid substrate, 1cm X 1cm X 500 micron chip
15. mixed chemicals: none
16. MSDS: http://hazard.com/msds/f2/byg/bygcm.html
17. 99.99% pure
19. Material will not be stored in the lab
20. Material can be disposed with non-hazardous waste.  Arsenic
contamination from the implanter's hydrogen beam is considered minimal,
and will be noted in the storage and disposal of samples.

Supporting material is attached,
Thank you,
Jeremy Cheng

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METALLURGICAL TECHNOLOGIES,INC -- METEC 1083 YTTRIA STABILIZED ZIRCONIA 20% YTTRIUM OXIDE  -- 3439-01-397-7832
<pre>=====================  Product Identification  =====================

Product ID:METEC 1083 YTTRIA STABILIZED ZIRCONIA 20% YTTRIUM OXIDE
MSDS Date:04/01/1993
FSC:3439
NIIN:01-397-7832
MSDS Number: BYGCM
=== Responsible Party ===
Company Name:METALLURGICAL TECHNOLOGIES,INC
Address:14435 MAX ROAD
City:PEARLAND
State:TX
ZIP:77581
Country:US
Info Phone Num:713-485-7765
Emergency Phone Num:713-485-7765
CAGE:63726
=== Contractor Identification ===
Company Name:METALLURGICAL TECHNOLOGIES,INC
Address:14435 MAX ROAD
Box:City:PEARLAND
State:TX
ZIP:77581
Country:US
Phone:713-485-7765
CAGE:63726

=============  Composition/Information on Ingredients  =============

Ingred Name:ZIRCONIUM OXIDE
CAS:7440-67-7
RTECS #:ZH7070000
Fraction by Wt: 80%
Other REC Limits:NONE RECOMMENDED
OSHA PEL:5 MG/M3
ACGIH TLV:5 MG/M3/10 STEL;9495

Ingred Name:YTTRIUM OXIDE
CAS:12005-21-9
Fraction by Wt: 20%
Other REC Limits:NONE RECOMMENDED

=====================  Fire Fighting Measures  =====================

Flash Point:NA
Autoignition Temp:Autoignition Temp Text:NA
Lower Limits:NA
Upper Limits:NA
Extinguishing Media:NA
Fire Fighting Procedures:NONE
Unusual Fire/Explosion Hazard:NOT CONSIDERED FLAMMABLE; HOWEVER FINELY
    DIVIDED POWDER IN THE FORM OF A DUST CLOID CAN IGNITE IF CONTACTED
    BY ANY IGNITION SOURCE.

=============  Exposure Controls/Personal Protection  =============

Supplemental Safety and Health

==================  Physical/Chemical Properties  ==================

HCC:N1
Boiling Pt:B.P. Text:NA
Melt/Freeze Pt:M.P/F.P Text:NA
Decomp Temp:Decomp Text:NA
Vapor Pres:NA
Vapor Density:NA
Spec Gravity:5.8
pH:NA
Viscosity:NA
Evaporation Rate & Reference:NA
Solubility in Water:INSOLUBLE
Appearance and Odor:LOOKS LIKE FINE SAND, NO ODOR.
Percent Volatiles by Volume:NA
Corrosion Rate:NA

=================  Stability and Reactivity Data  =================

Stability Indicator/Materials to Avoid:YES
NONE KNOWN.
Stability Condition to Avoid:NA

 Disclaimer (provided with this information by the compiling agencies):
 This information is formulated for use by elements of the Department
 of Defense.  The United States of America in no manner whatsoever,
 expressly or implied, warrants this information to be accurate and
 disclaims all liability for its use.  Any person utilizing this
 document should seek competent professional advice to verify and
 assume responsibility for the suitability of this information to their
 particular situation.

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------- End of Forwarded Message




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