stabilized Zirconia SpecMar request, follow-up

Mary Tang mtang at snf.stanford.edu
Tue Mar 23 12:44:25 PST 2004


Jim, John, Mike --

What do you fellows say?  I'm afraid I've absolutely no idea about potential contamination or process issues at
implant.

Mary

Jeremy Cheng wrote:

> Hello,
>
>         I'm following up on this SpecMat request, submitted 2 weeks ago.
> Is there any update on the status or any further information needed?
>
> Thanks!
> Jeremy Cheng
>
> acopland at snf.stanford.edu
>
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> Date: Mon, 08 Mar 2004 11:08:09 -0800
> From: Jeremy Cheng <acopland at stanford.edu>
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> To: specmat at snf.stanford.edu
> CC: acopland at stanford.edu
> Subject: stabilized Zirconia SpecMat request
> Content-Type: multipart/mixed;
>  boundary="------------976558846A34F9FFB85FDD31"
>
> This is a multi-part message in MIME format.
> - --------------976558846A34F9FFB85FDD31
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>
> I would like to submit this request for the processing of single crystal
> stabilized zirconia.  Zirconia is an inert, stable, oxide ceramic and a
> common microfab compatible high-K dielectric material:
>
> 1. Name: Jeremy Cheng
> 2. Phone: x5-9936
> 3. e-mail: acopland at stanford.edu
> 4. PI: Prof. Fritz Prinz, ME
> 5. Materials: Yttria-stabilized Zirconia (a.k.a. YSZ, stabilized
> zirconia, cubic zirconia)
> 6. Secondary Materials: none
> 7. Vendor/ manufacturer: MTI crystal (www.mticrystal.com)
> 8. http://mticrystal.com/datasheet/YSZ.doc
> 9. Vendor address:
>     2700 Rydin Road, Unit D
>     Richmond, CA 94804
>     (510)525-3070
>
> 10.11.
>    I'd like to study ion damage in these substrates in the ion
> implanter.  YSZ exhibits unusually high radiation stability.  If the
> implants are successful, we'd like to alternate depositing this material
> from our on-campus sputtering machine with implanting the the snf
> implanter.
>
> 12. lab equipment: Varian 350-D, wbgeneral
> 13. quantity: up to about 5 single crystal substrates at a time
> 14. solid substrate, 1cm X 1cm X 500 micron chip
> 15. mixed chemicals: none
> 16. MSDS: http://hazard.com/msds/f2/byg/bygcm.html
> 17. 99.99% pure
> 19. Material will not be stored in the lab
> 20. Material can be disposed with non-hazardous waste.  Arsenic
> contamination from the implanter's hydrogen beam is considered minimal,
> and will be noted in the storage and disposal of samples.
>
> Supporting material is attached,
> Thank you,
> Jeremy Cheng
>
> - --------------976558846A34F9FFB85FDD31
> Content-Type: text/html; charset=us-ascii;
>  name="YSZ MSDS.htm"
> Content-Transfer-Encoding: 7bit
> Content-Disposition: inline;
>  filename="YSZ MSDS.htm"
>
> METALLURGICAL TECHNOLOGIES,INC -- METEC 1083 YTTRIA STABILIZED ZIRCONIA 20% YTTRIUM OXIDE  -- 3439-01-397-7832
> <pre>=====================  Product Identification  =====================
>
> Product ID:METEC 1083 YTTRIA STABILIZED ZIRCONIA 20% YTTRIUM OXIDE
> MSDS Date:04/01/1993
> FSC:3439
> NIIN:01-397-7832
> MSDS Number: BYGCM
> === Responsible Party ===
> Company Name:METALLURGICAL TECHNOLOGIES,INC
> Address:14435 MAX ROAD
> City:PEARLAND
> State:TX
> ZIP:77581
> Country:US
> Info Phone Num:713-485-7765
> Emergency Phone Num:713-485-7765
> CAGE:63726
> === Contractor Identification ===
> Company Name:METALLURGICAL TECHNOLOGIES,INC
> Address:14435 MAX ROAD
> Box:City:PEARLAND
> State:TX
> ZIP:77581
> Country:US
> Phone:713-485-7765
> CAGE:63726
>
> =============  Composition/Information on Ingredients  =============
>
> Ingred Name:ZIRCONIUM OXIDE
> CAS:7440-67-7
> RTECS #:ZH7070000
> Fraction by Wt: 80%
> Other REC Limits:NONE RECOMMENDED
> OSHA PEL:5 MG/M3
> ACGIH TLV:5 MG/M3/10 STEL;9495
>
> Ingred Name:YTTRIUM OXIDE
> CAS:12005-21-9
> Fraction by Wt: 20%
> Other REC Limits:NONE RECOMMENDED
>
> =====================  Fire Fighting Measures  =====================
>
> Flash Point:NA
> Autoignition Temp:Autoignition Temp Text:NA
> Lower Limits:NA
> Upper Limits:NA
> Extinguishing Media:NA
> Fire Fighting Procedures:NONE
> Unusual Fire/Explosion Hazard:NOT CONSIDERED FLAMMABLE; HOWEVER FINELY
>     DIVIDED POWDER IN THE FORM OF A DUST CLOID CAN IGNITE IF CONTACTED
>     BY ANY IGNITION SOURCE.
>
> =============  Exposure Controls/Personal Protection  =============
>
> Supplemental Safety and Health
>
> ==================  Physical/Chemical Properties  ==================
>
> HCC:N1
> Boiling Pt:B.P. Text:NA
> Melt/Freeze Pt:M.P/F.P Text:NA
> Decomp Temp:Decomp Text:NA
> Vapor Pres:NA
> Vapor Density:NA
> Spec Gravity:5.8
> pH:NA
> Viscosity:NA
> Evaporation Rate & Reference:NA
> Solubility in Water:INSOLUBLE
> Appearance and Odor:LOOKS LIKE FINE SAND, NO ODOR.
> Percent Volatiles by Volume:NA
> Corrosion Rate:NA
>
> =================  Stability and Reactivity Data  =================
>
> Stability Indicator/Materials to Avoid:YES
> NONE KNOWN.
> Stability Condition to Avoid:NA
>
>  Disclaimer (provided with this information by the compiling agencies):
>  This information is formulated for use by elements of the Department
>  of Defense.  The United States of America in no manner whatsoever,
>  expressly or implied, warrants this information to be accurate and
>  disclaims all liability for its use.  Any person utilizing this
>  document should seek competent professional advice to verify and
>  assume responsibility for the suitability of this information to their
>  particular situation.
>
> - --------------976558846A34F9FFB85FDD31
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> ------- End of Forwarded Message

--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu





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