Transparent wafers +dyed / anti-reflective LOL2000?
mtang at snf.stanford.edu
Mon May 17 14:35:59 PDT 2004
Hi Sebastian --
Are you using the AZ3617 dyed resist? I am not familiar with how this works
with the LOL2000, but theoretically, this should avoid the problems with
double exposure due to transparent (This resist was introduced to get
around problems with transparent substrates). Mahnaz -- is that correct?
"Sebastian J. Osterfeld" wrote:
> I am trying to get good lift-off results on transparent substrates, and
> I am running into problems with feature resolution. Sometimes this is
> due to reflection of the UV from the lower boundary of the transparent
> substrate, I hear. This can be avoided by coating the substrate with a
> non-reflective material.
> Since I coat my substrates in LOL2000 anyway, wouldn't it be ideal to
> have a *strongly* absorbent and UV-opaque LOL2000 formulation available?
> Would you be able to mix some LOL2000 that would, essentially, be black?
> This should allow me to get good results on a.) transparent substrates
> and b.) reflective materials such as Aluminum.
> Sebastian J. Osterfeld
> PhD. Student / Shan X. Wang Group
> Dept. of Materials Science & Engineering
> Residential Mailing Address:
> 796 Escondido Rd, Apt 23B
> Stanford, CA 94305
> Office Mailing Address:
> McCullough Building, Room 208A
> 476 Lomita Mall
> Stanford, CA 94305-4045
> Home: (650) 498-1666 (with answering machine)
> Work: (650) 723-2939
> Fax: (650) 736-1984 (at work)
> Email: Osterfeld at stanford.edu
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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