nickel silicide process concern in SNF.
mtang at snf.stanford.edu
Wed Nov 3 09:19:05 PST 2004
Great! Thanks! So, are there "official" semiclean B rules now (other
than the wet bench concerns?) Are they ready enough to post to
SpecMat? (And are there any plans for plasma etchers? I think this is
where Jun has concerns...)
Michael Deal wrote:
> According to the semiclean B rules, one can use all the semicleanA
> tools except the plasma etchers. And we officially sanction semiclean
> B when Jim reports back on the wet bench issues.
> At 07:46 AM 11/3/2004, Mary Tang wrote:
>> Hi all --
>> Does this request relate to the SemicleanA and SemicleanB project?
>> How's that going, by the way? Jun made the first official SpecMat
>> request in July, and he and his PI have been talking with several of
>> us about this well before then... I can't seem to find his process
>> flow at the moment, but I understand that he wants to be able to do
>> standard backend stuff (LTO, P5000 etch, anneal). Anyway, this group
>> is pretty active in the lab and seem to be reasonably
>> knowledgeable... Can we work with them to get any additional
>> information that might be required to establish a system for using
>> nickel silicides?
>> Yuan wrote:
>>> Dear committee:
>>> I plan to use the nickel silicide process soon in this lab ( I plan to
>>> deposit nickel in the new machine which is semi-clean, based on the
>>> conversion with Ed Myers), but I really want to know
>>> whether I can use the other clean or semiclean tools after the nickel
>>> silicide process(i,e, could the nickel silicide be treated similar to
>>> ti-silicide ?).
>>> I do wish I can get this answer soon, so that I can plan it
>>> Jun Yuan
>>> Electrical Engineering department,
>>> University of California, Los Angeles
>>> Tel: 1-310-206-7331 (O)
>>> Tel: 1-310-313-6681 (H)
>> Mary X. Tang, Ph.D.
>> Stanford Nanofabrication Facility
>> CIS Room 136, Mail Code 4070
>> Stanford, CA 94305
>> mtang at stanford.edu
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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