nickel silicide process concern in SNF.

Mary Tang mtang at snf.stanford.edu
Wed Nov 3 09:19:05 PST 2004


Great!  Thanks!  So, are there "official" semiclean B rules now (other 
than the wet bench concerns?)  Are they ready enough to post to 
SpecMat?  (And are there any plans for plasma etchers?  I think this is 
where Jun has concerns...)

Mary

Michael Deal wrote:

>
> According to the semiclean B rules, one can use all the semicleanA 
> tools except the plasma etchers.  And we officially sanction semiclean 
> B when Jim reports back on the wet bench issues.
>                                 -mike
>
>
> At 07:46 AM 11/3/2004, Mary Tang wrote:
>
>> Hi all --
>>
>> Does this request relate to the SemicleanA and SemicleanB project?
>> How's that going, by the way?  Jun made the first official SpecMat 
>> request in July, and he and his PI have been talking with several of 
>> us about this well before then...  I can't seem to find his process 
>> flow at the moment, but I understand that he wants to be able to do 
>> standard backend stuff (LTO, P5000 etch, anneal).  Anyway, this group 
>> is pretty active in the lab and seem to be reasonably 
>> knowledgeable...  Can we work with them to get any additional 
>> information that might be required to establish a system for using 
>> nickel silicides?
>>
>>
>> Mary
>>
>> Yuan wrote:
>>
>>> Dear committee:
>>> I plan to use the nickel silicide process soon in this lab ( I plan to
>>> deposit nickel in the new machine which is semi-clean, based on the
>>> conversion with Ed Myers), but I really want to know
>>> whether I can use the other clean or semiclean tools after the nickel
>>> silicide process(i,e, could the nickel silicide be treated similar to
>>> ti-silicide ?).
>>> I do wish I can get this answer soon, so that I can plan it 
>>> ACCORDINGLY.
>>> Thanks.
>>>
>>> Jun Yuan
>>> --------------------------
>>> Electrical Engineering department,
>>> University of California, Los Angeles
>>> Tel: 1-310-206-7331 (O)
>>> Tel: 1-310-313-6681 (H)
>>>
>>
>>
>> -- 
>> Mary X. Tang, Ph.D.
>> Stanford Nanofabrication Facility
>> CIS Room 136, Mail Code 4070
>> Stanford, CA  94305
>> (650)723-9980
>> mtang at stanford.edu
>> http://snf.stanford.edu
>>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




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