mtang at snf.stanford.edu
Thu Nov 4 07:34:18 PST 2004
Hi Seung Rim --
Sylgard 184 is approved for use in limited areas of the lab. Uncured
PDMS is allowed only at the headway. PDMS must be mixed outside the lab
(the silicone monomer can easily contaminate the litho area and cause
lifting everywhere.) Cured PDMS is allowed in many (not all)
gold-contaminated stations. If you wish to use PDMS, please provide a
process flow with your equipment list. You can come and talk with
Mahnaz or me, if you like.
Seung Rim wrote:
> To whom it may concern,
> I want to check if PDMS (Product name: Sylgard 184 by Dow Corning) is
> already approved in SNF or not. I want to use it with my project.
> Can I know equipments which are allowed to use PDMS ?
> Seung Bum Rim
> Electrical Engineering Stanford University
> (650)725-0419 srim at stanford.edu
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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