Metals sputtered in the SCT

Abhijit Pethe pethe at stanford.edu
Sun Nov 28 22:03:51 PST 2004


Hi,

We have achieved some initial sputtered Ni films in the SCT sputter
machine. I wanted to know what would be cleanliness stauts of the machine,
and where would wafers from this machine be allowed into for post
processing. Currently, Al and Ti films sputter deposited in the gryphon
are allowed into

1. wbmetal
2. tylanbpsg metal side
3. p5000 Chamber A
4. tylanfga

Will it be possible to allow the use of metal films deposited in the SCT
into any one or all of the above equipment?

Thanks
Abhijit





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