Boron drive in question

Nancy Latta latta at snf.stanford.edu
Tue Nov 30 11:22:50 PST 2004


Specmat Folks,

I have a request from a student to drive-in boron, after a pre-dep, to 
5um.  By his calculation, this should take about 24 hrs at 1100C.  He 
has proposed using tylan1 or 2 or the pre-dep furnace itself.

Do you have any thoughts on other options?

With the Dec shutdown coming up, a timely answer would be appreciated.

Thanks,

-Nancy



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