Fragile chips in Tylan4
Amir Ali Haj Hossein Talasaz
atalasaz at stanford.edu
Fri Oct 1 12:00:08 PDT 2004
I have some fragile devices which containes 30nm SiN membrane. I would like
to put them in Tylan 4 (which is gold contaminated) for half an hour at 800C
(This step is very important for me).
Since I am dealing with these fragile membranes, I was wondering if I can
avoid normal cleaning which we perform prior to furnace loading and load
them to Tylan 4(which is gold contaminated).
(I have already put the devices in Acetone for 1 days)
Thanks for your time,
More information about the specmat