EV Bonder Anodic Bonding vs Non-Anodic Bonding

Shabbir A. Bashar, Ph.D. bashar at snf.stanford.edu
Tue Oct 12 10:42:15 PDT 2004


Hi Mahnaz,

Thanks for the taking time out of your obviously busy day to call me back.
Here are the answers:
1. metals:1. gold (melting pt. 1064C); titanium (melting pt. 1660C);
platinum (melting point app. 1772C).
2. this will be a Silicon based process
3. recipe: 100N, vacuum, ramp up to 325C in 50mins, soak at 325C for 10mins;
ramp down to room temp;  cycle time app. 120mins

Kind regards,

Shabbir.




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