EV Bonder Anodic Bonding vs Non-Anodic Bonding
mahnaz at snf.stanford.edu
Tue Oct 12 11:49:23 PDT 2004
Please use the system with si substrate and with the recipe you mention here .
I will be in the lab all afternoon any way.
"Shabbir A. Bashar, Ph.D." wrote:
> Hi Mahnaz,
> Thanks for the taking time out of your obviously busy day to call me back.
> Here are the answers:
> 1. metals:1. gold (melting pt. 1064C); titanium (melting pt. 1660C);
> platinum (melting point app. 1772C).
> 2. this will be a Silicon based process
> 3. recipe: 100N, vacuum, ramp up to 325C in 50mins, soak at 325C for 10mins;
> ramp down to room temp; cycle time app. 120mins
> Kind regards,
More information about the specmat