Thanks for approval!
Shabbir A. Bashar, Ph.D.
bashar at snf.stanford.edu
Tue Oct 12 12:19:15 PDT 2004
Thanks very much for your quick approval. It is now 12:00pm. We will not
be able to do the bond today but will try it at the next available slot.
From: Mahnaz Mansourpour [mailto:mahnaz at snf.stanford.edu]
Sent: Tuesday, October 12, 2004 10:49 AM
To: Shabbir A. Bashar, Ph.D.
Cc: Richard Crane; John Shott; Mary Tang; Paul Rissman;
specmat at snf.stanford.edu
Subject: Re: EV Bonder Anodic Bonding vs Non-Anodic Bonding
Please use the system with si substrate and with the recipe you mention here
I will be in the lab all afternoon any way.
"Shabbir A. Bashar, Ph.D." wrote:
> Hi Mahnaz,
> Thanks for the taking time out of your obviously busy day to call me back.
> Here are the answers:
> 1. metals:1. gold (melting pt. 1064C); titanium (melting pt. 1660C);
> platinum (melting point app. 1772C).
> 2. this will be a Silicon based process
> 3. recipe: 100N, vacuum, ramp up to 325C in 50mins, soak at 325C for
> ramp down to room temp; cycle time app. 120mins
> Kind regards,
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